# | Class | status | |
---|---|---|---|
1 |
S:85205232
M:REGC O:Carl Zeiss SMT AG, Carl Zeiss SMT GmbH |
9 | Dead |
2 |
S:77734098
M:FLEXILLU O:Carl Zeiss SMT AG, Carl Zeiss SMT GmbH |
9 | Registered |
3 |
S:77494458
M:PROVE O:Carl Zeiss SMT AG, CARL ZEISS SMT GMBH |
9 | Registered |
4 |
S:78610169
M:MERIT O:Carl Zeiss SMT AG, CARL ZEISS SMT GMBH |
9 | Registered |